ISSN print edition: 0366-6352 ISSN electronic edition: 1336-9075 Registr. No.: MK SR 9/7 Published monthly

 Wetting of epitaxial silicium layer and pyrolytic SiO₂ layer

V. Hrivnáková, Ľ. Lapčík, S. Fekete, and L. Hebort

Department of Textile, Pulp, and Paper, Slovak Technical University, CS-812 37 Bratislava

Abstract:  The process of adhesion of water and organic liquids on the surface of Si and SiO₂ was studied. The values of dispersion σ_d(s) and polar aσ_p(s) components of the density of the surface Gibbs energy σ(s) of epitaxial Si layer and pyrolytic SiO₂ layer were determined by the method based on measuring the angle of wetting φ. It has been found that the polar component of interaction regulates the density of the surface Gibbs energy of the above substrates.

Full paper in Portable Document Format: 386a731.pdf

Chemical Papers 38 (6) 731–738 (1984)